接前面SEM相关网络视频与文章资源,记录ebeam相关的网络链接,大杂烩
产品
抛开仪器类的 SEM、TEM、STEM 等产品,电子束在半导体行业的应用主要体现在:
- EBI
- DR-SEM
- CD-SEM
- EBL
国内相关的公司和单位有:东方晶源、上海精测、苏州矽视、惠然科技、无锡亘芯悦、 金竟科技、中电科48所、上海大尘微影、...
先接单罗列一下大致产品清单(国外):
EBI
单束
有些已经淡出这个市场:
- Hitachi:GS1000
多束
- ASML-HMI:eScan1100,eScan1000
DR-SEM
- AMAT:SEMVision G10,SEMVision G7,SEMVisoin CX300
- KLA:eDR
- Hitachi:CT1000,CR7300
- Advantest:E5620(MASK)
- Holon:LEXa-20(MASK)
CD-SEM
- Hitachi:GT2000,CG7300,CS4800,CV6300,S9380,...
- AMAT:VeritySEM 10,VeritySEM 6C
- Advantest:E3650(MASK)
- Holon:ZX-D(MASK)
淡出市场:
- KLA:8450,8100
EBL
单束(高斯束,变型束):
- Raith:EBPG5200,EBPG5000,Voyager,Raith150 Two,Raith150,E-Line,Pioneer
- JEOL:JBX9500FS,JBX-8100FS G3,JBX-8100FS,JBX-A9,JBX3200MVS,JBX-3050MVS
- ELIONIX:ELS-BODEN Σ,ELS-BODEN,ELS-HAYATE,ELS-ORCA,
- Nuflare:EBM-9500PLUS,EBM-8000P
- Crestec:CABL-UH,CABL-AP
- Vistec:VISTEC SB3050-2
- NanoBeam:nB5
淡出市场:
- Advantest:F7000
多束(Multi-beam,Multi-column)
- Nuflare:MBM2000,MBM2000Plus
- IMS(Intel):MBMW-101
- MultiBeam:MB300,MB200
曾经很有名的
- Mapper(ASML):FLX 1200
网络知识链接
EBL
youtube视频
- Raith Group Electron Beam Lithography
- MIT.nano A brief introduction to e-beam lithography
- Duke university - SMIF Introduction to EBL
链接
- KNI Lab at Caltech EBPG 5000+: 100 kV Electron Beam Lithography
- KNI Lab at Caltech EBPG 5200: 100 kV Electron Beam Lithography
- Yale University Electron-Beam Lithography Training
- Stanford University EBL – A Practical Guide
- University of Washington The E-Beam Exposure Process - Overview
- https://snsf.stanford.edu/facilities/fab/npc/ebl
- https://en.wikipedia.org/wiki/Electron-beam_lithography
- https://en.wikipedia.org/wiki/Photolithography